SiC Carrier & Chuck Table
Silicon carbide vacuum carriers and chuck tables for wafer processing, handling and dicing.
Product Overview
Our SiC carriers and chuck tables are precision-engineered for semiconductor wafer processing applications. SiC vacuum carriers provide reliable wafer holding during processing, transfer and cleaning operations. Chuck tables serve as wafer dicing and processing platforms. Both products feature high flatness, controlled porosity and excellent surface treatment for demanding semiconductor manufacturing environments.
Applications
SiC Wafer ProcessingGaAs Wafer HandlingWafer DicingWafer CleaningVacuum Chuck ApplicationsSemiconductor Manufacturing
Key Features
High adsorption force for secure wafer holding
High flatness and parallelism through precision grinding
Controlled porosity (20-25%) for vacuum applications
Surface roughness < 2μm
Low electrical resistance for anti-static performance
Compatible with 6", 8" and 12" stainless steel bases
Available Materials
Silicon Carbide (SiC)Stainless Steel Base (SUS304/316)
Technical Specifications
| Parameter | Specification |
|---|---|
| Thickness Options | 0.7mm, 1.0mm, 2.0mm (custom available) |
| Base Sizes | 6", 8", 12" stainless steel |
| Porosity | 20-25% |
| Surface Roughness | < 2μm |
| Flatness | High precision (application dependent) |
| Parallelism | High precision (application dependent) |
| Surface Treatment | Precision ground |
Customization Available
Customized specifications are available according to customer requirements. Contact us to discuss your specific needs.
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