Semiconductor Equipment Parts
Precision components for semiconductor manufacturing equipment.
Product Overview
We supply precision semiconductor equipment components including showerheads, electrostatic chucks (ESC), quartz rings, sapphire tubes, upper electrodes, diffusion bottles, diffusion tubes and other critical equipment parts. These components are manufactured to meet the demanding requirements of semiconductor fabrication processes.
Applications
CVD EquipmentEtching EquipmentIon ImplantationDiffusion FurnacesPVD EquipmentSemiconductor Fabrication
Key Features
Showerhead for uniform gas distribution in CVD/PVD processes
ESC (Electrostatic Chuck) for wafer clamping during processing
Quartz Ring for high-temperature process environments
Sapphire Tube for optical and chemical-resistant applications
Upper Electrode for plasma processing equipment
Diffusion Bottle and Diffusion Tube for furnace applications
Available Materials
QuartzSilicon Carbide (SiC)SapphireAluminum AlloyCeramicsStainless Steel
Technical Specifications
| Parameter | Specification |
|---|---|
| Components | Showerhead, ESC, Quartz Ring, Sapphire Tube, Upper Electrode, Diffusion Bottle, Diffusion Tube |
| Materials | Quartz, SiC, Sapphire, Aluminum Alloy, Ceramics, Stainless Steel |
| Customization | Available according to customer drawings and specifications |
Customization Available
Customized specifications are available according to customer requirements. Contact us to discuss your specific needs.
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